Park Systems introduces the Park NANO standard for traceable calibration standards


Park Systems, a provider of atomic force microscopy (AFM) and nanometrology solutions, has announced the launch of the Park NANOstandard™ product line. This new product line provides calibration standards for AFM and SEM measurements, allowing users to accurately measure and analyze your samples. The Park NANO standard is equivalent to NIST-tracked products for measuring critical dimensions (CD) of semiconductor structures, among other things.

Park NANOstandard

Park NANOstandard products include the AFM Tip Characterizer (AFMTC) and High Magnification Calibration (HMC). AFMTC is a calibration sample designed to estimate the radius and half-cone angle of an atomic force microscope (AFM) tip. It is a nano-pattern with a line width of 10 nm to 50 nm. It is traced by the Korea Research Institute of Standards and Science (KRISS) to ISO 17034:2016 and is traced through a permanent atomic lattice in a silicon substrate by HR-TEM. Software for calibration and uncertainty calculation is also provided.

"Park NANOstandard products will help our customers ensure the accuracy of their measurements and improve product quality."

The standard HMC sample is made of polycrystalline silicon and has five certified values for line widths ranging from 20 nm to 80 nm and five certified values for pitch values ranging from 100 nm to 900 nm. The HMC standard is traceable to KRISS for ISO 17034:2016. It can also be traced through the atomic lattice constant in a silicon substrate using high-resolution transmission electron microscopy (HR-TEM).

Park NANOstandard products are manufactured by Kims Reference Corp. in collaboration with Park Systems, a leading manufacturer of modern reference materials for nano-measurement and surface analysis. "Park NANOstandard products will help our customers ensure measurement accuracy and improve product quality," said Vice President of Product Marketing Richard Lee. "We are proud to partner with Kims Reference Corp. to bring this innovative product line to market."

Park Systems is committed to providing its customers with the highest quality products and services. . The Park NANOstandard product line is designed to provide reliable and accurate calibration of AFM and SEM systems, allowing users to accurately measure and analyze their samples.



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