SEMI standards leaders celebrated at SEMICON West 2023


SEMI, the global industry association that brings together the entire electronics supply chain and design, today recognized industry leaders for outstanding development achievements standards for electronics and related industries. The SEMI Standards Awards were announced on July 11 at at the SEMI International Standards reception at SEMICON West 2023 at the Moscone Center in San Francisco.

SEMI International Standards Excellence Award

<p>The Excellence Award, which has been presented since 1992, was recognized this year by the leadership teams of the Taiwan Fab & Hardware Information Security Task Force and the North American Fab & Hardware Computer and Device Security Task Force (CDS) developed SEMI E187 - Fab Equipment Cyber Security Specification and SEMI E188 - Specification for Malware-Free Hardware Integration, respectively. These additional standards address the basic safety issues of factory and semiconductor manufacturing equipment.

SEMI honored the following award recipients:

  • of Richard Howard of Cimetrix by PDF Solutions
  • Ryan Bond from Intel
  • Ares Cho from ITRI
  • Leon Change TSMC

SEMI E187 significantly improves information security throughout the supply chain, including semiconductor manufacturers, customers and suppliers. The SEMI E188 prevents malware from spreading to production facilities during the delivery of critical equipment and helps both device manufacturers and equipment suppliers improve equipment reliability and uptime.

Corporate Device Manufacture Award

The North American SEMI International Standards Corporate Device Member Award recognizes a representative of a device manufacturer for outstanding contributions to the development of SEMI standards.

  • Emily Lew of X-FAB Silicon Foundries SE played an important role in revising wafer marking standards SEMI M12 and M13. Liu worked with key members of the Global Silicon Wafer Technical Committee to create additional specifications for laser marking on the backside of 200mm wafers, clarifying the scope of both standards. She chairs the 5-year tracking review working group and is an active member of many other global SEMI technical committees.

Award for merit

The North American SEMI International Standards Merit Award recognizes outstanding contributions to the SEMI International Standards program in solving complex problems at the working group level and bringing projects to completion.

  • Oleksandr Tregub from ATCP Consulting Services formed and chairs the Chemical Mechanical Planarization Consumables (CMP-C) Working Group under the direction of the SEMI Liquid Chemicals North America Global Technical Committee. Tregub helped publish four new CMP-C standards for hardness, density, and porosity of pads, discs, and windows (SEMI C100C102C103C104) and two more in development (rings and PSA). Together, Tregub and the CMP-C working group demonstrate tremendous effort, dedication and support to advance the technology and meet the needs of semiconductor manufacturers.

Leadership Award

The North American SEMI International Standards Leadership Award recognizes individuals who have strengthened SEMI's standards program by educating members, mentoring and recruiting new members. Leaders play a critical role in preparing new volunteers to be productive committee members by effectively guiding them through the standardization process.

  • Andrew PetrashakTokyo Electron led the S1 (Security Label) Revision Working Group by reaching a consensus to improve compliance SEMI S1 and compliance with best practices. He rallied his peers and competitors to complete the SEMI S1 review. Petrashak not only heads the S2 Mechanical Design Task Force, which works on the improvement of lifting equipment (§ 18.6) and articulated loads (§ 18.7) of the well-known SEMI S2, Guidelines for the Safety of Manufacturing Equipment, he also leads the development of the enhancement SEMI S3 (heating systems).

Honorary award

The North American SEMI International Standards Honor Award recognizes individuals who have made a long-term commitment to the advancement of SEMI standards.

  • Dr. Mohamed Salim with Brooks Instrument/ITW has been an active participant in the SEMI standards program as an industry volunteer for more than 25 years. Salim's extensive experience in the SEMI standards program has been critical to the results, and he remains a key force in advancing topics through the SEMI standards process. Salim is a member of the North American Regional Standards Committee and Chair of the Gases North America Global Technical Committee. He also chairs three other gas working groups and is the author of many widely used standards such as SEMI F20 (distribution systems 316 SS), F58 (test method for moisture drying in gas delivery systems), F70 (contribution of shares), F105 (guide on the compatibility of metallic materials) and SEMI E186(EtherCAT ports in MFC).
  • Koh Murai of KESG/MEGA has been an active participant in the SEMI standards program as a Volunteer Industry Expert for over 12 years and is a member of the North American Regional Standards Committee. Murai chairs the Global Liquid Chemicals Technical Committee in North America, chairs the High Purity Working Group, and provides support to many other liquid chemicals working groups. Murai has played an important role in the creation and revision of many well-known standards such as SEMI F31 (systems of mass distribution of chemicals), F39 (chemical mixing systems), F41 (attestation of the mass chemicals distribution system), series E49 (E49.2, E49.4, E49.5, E49.7 - Performance Guide for High and Ultra Purity Piping, Subassemblies, and Final Assemblies), other miscellaneous chemical standards, and several new slurry standards.

To learn more, visit web page international SEMI standards.



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